A Design and Simulation of Optical Pressure Sensor Based on Photonic Crystal in Sub-Micron Range

Abstract

MOEMS based micro-sized pressure sensor can be developed to detect even sub-micron range dimension change using the photonic crystal. The applied pressure on the object will change the dimension of the waveguide carved in the photonic crystal. As a result, this change in spacing can alter the propagation feature of electromagnetic waves that pass through them that is changing the transmission spectrum. So, this change can directly be mapped to pressure on the observed object. In this paper, the pressure sensor using photonic crystal has been modeled and analyzed.

Keywords: FDTD, MOEMS, Micro-optics, Photonic crystal, Photonic sensing technology, Pressure Sensor