Xingyu Liu

Tsinghua University

Beijing, 100084

China

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An Efficient Lumped Parameters Model for Research and Development of Advanced MEMS Acoustic Sensor

Number of pages: 90 Posted: 22 Jan 2026

Xingyu Liu, Haoxian Yan, Qiaoqiao Kang, Yanxiu Zhang, Yi Yang and Tian-Ling Ren

Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University, Tsinghua University and Tsinghua University

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