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Liang Yu

Harbin Institute of Technology

92 West Dazhi Street

Nan Gang District

Harbin, 150001

China

  • Harbin Institute of Technology

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Simplified comprehensive model of plane-mirror interferometers for efficient iterative multi-degree-of-freedom measurement

Number of pages: 30 Posted: 28 Jan 2026
Pengcheng Hu, Haisu Lv, Hao Sun, Jinxuan Wu, Tuo Xu, FeiFei Yan, Xiang Tian, Liang Yu, Haijin Fu and Ruitao Yang
Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology and Harbin Institute of Technology
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Abstract:

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Plane-mirror interferometer, Optical path simplification, Geometric error, Displacement model, Iterative computation method, Multi-degree-of-freedom measurement