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Diego G. Guzmán

affiliation not provided to SSRN

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Controlling NiOx Properties in PEALD: The Crucial Role of Water Plasma Power

Number of pages: 35 Posted: 16 Feb 2026
Diego G. Guzmán, Mario A. Hidrogo-Rico, Eduardo Martinez-Guerra, Francisco das Chagas Marques, Paul Horley, Ana Paula de Melo Monteiro Modesto, Isabel Mendívil-Palma and F. Servando Aguirre-Tostado
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Centro de Investigación en Materiales Avanzados, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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nickel oxide (NiOx), plasma-enhanced atomic layer deposition (PEALD), H2O plasma, defect chemistry, p-type conductivity, band alignment, Work Function, Perovskite Solar Cells