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Shengguo Zhang

North University of China

No. 3 Xueyuan Road, Taiyuan, China

taiyuan, 030051

China

  • North University of China

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Scholarly Papers (1)

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Wafer-level SU-8 resonant cavity arrays modified by e-beam irradiation process for multiple bands THz absorption

Number of pages: 19 Posted: 26 Feb 2026
Kaixi Bi, Linyu Mei, Shengguo Zhang, Donghui Huang, Jialiang Chen, Qiannan Li and Xiujian Chou
North University of China, North University of China, North University of China, North University of China, North University of China, North University of China and North University of China - Science and Technology on Electronic Test and Measurement Laboratory
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Abstract:

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E-beam lithography, Su-8 array structure, Impedance interface, 3D carbon-based structures, multiple bands THz absorber