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Min-Kyu Park

Gachon University

1342 Seongnam-daero, Sujeong-gu, Seongnam-si

Seongnam

Korea, Republic of (South Korea)

  • Gachon University

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Scholarly Papers (1)

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Accurate Temperature Extraction in Embedded Polysilicon Micro-heaters

Number of pages: 25 Posted: 28 Feb 2026
Jinwoo Park, Hunhee Shin, Donghee Kim, Kangwook Choi, Wooseong Roh, Joon Hwang, Min-Kyu Park, Gyuweon Jung and Jong-Ho Lee
Seoul National University, Seoul National University, Seoul National University, Seoul National University, Seoul National University, Seoul National University, Gachon University, Seoul National University and Seoul National University
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Abstract:

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FET-type gas sensor, Poly-silicon heater, Resistance temperature detector(RTD)