Thais Macedo Vieira

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Role of Reactive Oxygen and Nitrogen Species on Al2O3 Growth by Plasma-Activated Water Atomic Layer Deposition: Evidence for Nitrate-Mediated Enhancement

Number of pages: 33 Posted: 08 Apr 2026

Júlia Karnopp, Thais Macedo Vieira, Julio César Sagás and R.S. Pessoa

affiliation not provided to SSRN, affiliation not provided to SSRN, Santa Catarina State University and affiliation not provided to SSRN

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