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Jing Lv

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Investigation on internal modification and delamination of 4H-SiC using 515 nm picosecond temporal pulse trains

Number of pages: 16 Posted: 02 May 2026
Jing Lv, Jialu Gao, Jiayi Yue, Jiaqi Qiu, Zhenqiang Zhang, Rujia Wang, Aofei Tang, Xiaoli Hou and Shujuan Li
affiliation not provided to SSRN, Xi’an University of Technology, Xi’an University of Technology, Xi’an University of Technology, Xi’an University of Technology, Xi’an University of Technology, Xi’an University of Technology, affiliation not provided to SSRN and Xi'an University of Technology - School of Mechanical and Precision Instrument Engineering
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Abstract:

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4H-SiC, 515 nm, temporal pulsed laser, internal modification, simple delamination