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Yi Wang

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Ga2O3 thin films grown at low temperature by ECR‐PEMOCVD on metallic Al substrates and their optoelectronic properties

Number of pages: 21 Posted: 02 May 2026
Xuan Wang, Yaxin Zhao, Shuang Zhao, Chun-Yu Ma, Jian Li, Yi Wang, H.S. Liu, Karpinski Dzmitry and Fuwen Qin
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Dalian University of Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, Dalian University of Technology, affiliation not provided to SSRN and Dalian University of Technology
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β-Ga2O3, ECR-PEMOCVD, Low-temperature growth, Aluminum substrate, Post-treatments