Arūnas Kadys

Vilnius University

Universiteto 3

Saulėtekio 9

Vilnius

Lithuania

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Metal-organic vapor phase epitaxy of InN on Si with Sc2O3 interlayer

Number of pages: 8 Posted: 04 Jun 2026

Tomas Grinys, Tadas Malinauskas, Arūnas Kadys, Augustas Vaitkevičius, Jan Devenson and Rimantas Gudaitis

Vilnius University, Vilnius University, Vilnius University, Vilnius University, affiliation not provided to SSRN and Kaunas University of Technology

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