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Thomas Chudoba

affiliation not provided to SSRN

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Growth-induced mechanical gradients and directional stiffness in ultrathin low-temperature ALD alumina coatings

Number of pages: 34 Posted: 06 Jun 2026
Krzysztof Maćkosz, Thomas Chudoba, Martin Zawischa, Yang Hu, Vladyslav Turlo, Johann Michler and Ivo Utke
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Swiss Federal Laboratories for Material Science and Technology (EMPA), Swiss Federal Laboratories for Material Science and Technology (EMPA), Laboratory for Mechanics of Materials and Nanostructures - Empa — Swiss Federal Laboratories for Materials Testing and Research and Swiss Federal Laboratories for Material Science and Technology (EMPA)
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Atomic layer deposition, ALD alumina, Ultrathin coatings, Spherical nanoindentation, Surface acoustic waves, Mechanical Anisotropy