default author photo

Łukasz Duda

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

1

DOWNLOADS

28

TOTAL CITATIONS

0

Scholarly Papers (1)

Actions:
Email selected abstracts
1.

Surface Microstructuring of Sol–Gel-Derived SiOx–TiOy Thin Films by Photolithography and ICP-RIE for Functional Photonic Components

Number of pages: 29 Posted: 27 Jun 2026
Krzysztof Czyż, Krzysztof Rola, Paweł Karasiński, Łukasz Duda, Magdalena Zięba, Cuma Tyszkiewicz, Ewa Gondek, Malgorzata Guzik and Joanna Cybińska
affiliation not provided to SSRN, affiliation not provided to SSRN, Silesian University of Technology, affiliation not provided to SSRN, Silesian University of Technology, Silesian University of Technology, affiliation not provided to SSRN, University of Wrocław and affiliation not provided to SSRN
Downloads 28

Abstract:

Loading...

SiOx-TiOy, photonic platform, rib waveguides, photolithography, sol-gel, optical losses