K. Bandyopadhyay

Bhabha Atomic Research Centre

Mumbai, 400085

India

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Studies on Photo Chemical Machining and Laser Lithography Processes

International Conference on Advances in Thermal Systems, Materials and Design Engineering (ATSMDE2017)
Number of pages: 6 Posted: 12 Feb 2018
T. K. Dewangan and K. Bandyopadhyay
Indira Gandhi Center for Atomic Research (IGCAR) - Homi Bhabha National Institute and Bhabha Atomic Research Centre
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Abstract:

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Ablation Depth, Excimer Laser Lithography, Metal Mask, Photo Chemical Machining