Weiwei Chen

Rutgers, The State University of New Jersey - Supply Chain Management Department

Piscataway, NJ

United States

SCHOLARLY PAPERS

1

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44

SSRN CITATIONS

0

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0

Scholarly Papers (1)

1.

Wafer Defect Inspection Optimization: Models, Analysis and Algorithms

Number of pages: 37 Posted: 13 May 2019
University of Tennessee, Knoxville - Department of Industrial and Systems Engineering, affiliation not provided to SSRN, Rutgers, The State University of New Jersey - Supply Chain Management Department, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 44 (424,442)

Abstract:

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wafer defect inspection, e-beam inspection, discrete optimization, approximation algorithm