Zhongshun Shi

University of Tennessee, Knoxville - Department of Industrial and Systems Engineering

Assistant Professor

Knoxville, TN 37996

United States

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Scholarly Papers (1)

1.

Wafer Defect Inspection Optimization: Models, Analysis and Algorithms

Number of pages: 37 Posted: 13 May 2019
Zhongshun Shi, Ming Qin, Weiwei Chen, Siyang Gao and Leyuan Shi
University of Tennessee, Knoxville - Department of Industrial and Systems Engineering, affiliation not provided to SSRN, Rutgers, The State University of New Jersey - Supply Chain Management Department, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 44 (424,064)

Abstract:

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wafer defect inspection, e-beam inspection, discrete optimization, approximation algorithm