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Byoung-Ho Choi

Korea University - School of Mechanical Engineering

Korea, Republic of (South Korea)

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Scholarly Papers (1)

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Evaluating Mechanical Properties of 100nm-Thick Atomic Layer Deposited Al2o3 as a Free-Standing Film

Number of pages: 22 Posted: 29 Apr 2020
Junmo Koo, Sangmin Lee, Junmo Kim, Dong Hwan Kim, Byoung-Ho Choi, TaekSoo Kim and Joon Hyung Shim
Korea University - School of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering, Korea University - School of Mechanical Engineering, Korea University - School of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering and Korea University - School of Mechanical Engineering
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Abstract:

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atomic layer deposition, alumina, tensile test, thin film, mechanical properties