M. Passoni

Polytechnic University of Milan

Piazza Leonardo da Vinci

Milan, Milano 20100

Italy

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Role of Energetic Ions in the Growth of fcc and ω Crystalline Phases in Ti Films Deposited by HiPIMS

Number of pages: 25 Posted: 06 Oct 2020

D. Dellasega, F. Mirani, D. Vavassori, C. Conti and M. Passoni

Polytechnic University of Milan, Polytechnic University of Milan, Polytechnic University of Milan, ISPC-CNR and Polytechnic University of Milan

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