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Marco Stampanoni

affiliation not provided to SSRN

  • affiliation not provided to SSRN

SCHOLARLY PAPERS

3

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134

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0

Scholarly Papers (3)

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1.

High Aspect Ratio Arrays of Si Nano-Pillars Using Displacement Talbot Lithography and Gas-Macetch

Number of pages: 21 Posted: 12 Sep 2022
Zhitian Shi, Konstantins Jefimovs, Marco Stampanoni and Lucia Romano
ETH Zürich, affiliation not provided to SSRN, affiliation not provided to SSRN and Paul Scherrer Institute (PSI)
Downloads 49 (1,074,648)

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metal assisted chemical etching, pattern transfer, nanostructures

2.

High Aspect Ratio Tilted Gratings Through Local Electric Field Modulation in Plasma Etching

Number of pages: 33 Posted: 26 Nov 2021
Zhitian Shi, Konstantins Jefimovs, Antonino La Magna, Marco Stampanoni and Lucia Romano
ETH Zürich, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Paul Scherrer Institute (PSI)
Downloads 46 (1,109,210)

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plasma etching, high aspect ratio, tilted etching, electric field modulation, diffractive optics, fan shaped gratings

3.

High-density void-free gold sub-micrometer gratings for X-ray grating interferometry​

Number of pages: 16 Posted: 11 Mar 2026
Liyang Chen, Qihui Yu, Ji Hye Kang, Alexandre Pereira, Gianluca Iori, Mattia Guscetti, Daniel Josell, Konstantins Jefimovs, Marco Stampanoni and Lucia Romano
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Paul Scherrer Institute (PSI)
Downloads 39 (1,263,436)

Abstract:

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Displacement Talbot lithography, high aspect ratio silicon etching, deep reactive ion etching, gold bottom-up electrodeposition, phase contrast X-ray imaging, Talbot-Lau interferometer