89, Yangdaegiro-gil, Ipjang-myeon
Seobuk-gu, Cheonan-si Chungcheongnam-do
Cheonan, 31056
Korea, Republic of (South Korea)
Korea Institute of Industrial Technology (KITECH)
triboelectric nanogenerator, 3-D porous pyramid structure, microplasitcs, nano toxic, water pollution
triboelectric nanogenerator, non-contact mode, impact, solar panel, self-cleaning, free oscillating
Post-CMP cleaning, PVA brush, spectrophotometry, particle contamination, semiconductor manufacturing, cleaning efficiency