Yingfeng He

University of Science and Technology Beijing

30 Xueyuan Road, Haidian District

beijing, 100083

China

  • University of Science and Technology Beijing

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Scholarly Papers (1)

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Low-Temperature Deposition of Crystalline Gan Thin Films on Quartz Substrates with Sharp Interfaces

Number of pages: 24 Posted: 12 Dec 2022
Sanjie Liu, Yingfeng He, Yangfeng Li, Jiayou Tao and Xinhe Zheng
Hunan Institute of Science and Technology, University of Science and Technology Beijing, Hunan University, Hunan Institute of Science and Technology and University of Science and Technology Beijing
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Abstract:

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GaN, PEALD, quartz substrates, sharp interfaces