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Shengyi Liu

Central South University - State Key Laboratory of High Performance Complex Manufacturing

Changsha

China

  • Central South University - State Key Laboratory of High Performance Complex Manufacturing

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Irreversible Bonding of PDMS-LiNbO 3 Microfluidic Device by Oxygen-Nitrogen Dual Plasma Surface Modification at Room Temperature

Number of pages: 29 Posted: 03 Jan 2022
Hongyu Guo, Bingyan Jiang, Tao Peng, Cui Fan, Shengyi Liu and Mingyong Zhou
Central South University - State Key Laboratory of High Performance Complex Manufacturing, Central South University - State Key Laboratory of High Performance Complex Manufacturing, Central South University - State Key Laboratory of High Performance Complex Manufacturing, Central South University - State Key Laboratory of High Performance Complex Manufacturing, Central South University - State Key Laboratory of High Performance Complex Manufacturing and Central South University - State Key Laboratory of High Performance Complex Manufacturing
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plasma modification, PDMS-LiNbO3 interface, bonding, microfluidics device