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Pengyan Mao

Shenyang Ligong University

Shenyang

China

SCHOLARLY PAPERS

1

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26

TOTAL CITATIONS

0

Scholarly Papers (1)

1.

Modulating Grain Size of Nanostructured Cu Films by Magnetron Sputtering

Number of pages: 19 Posted: 15 Feb 2022
Shenyang Ligong University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Shenyang Ligong University, Shenyang Ligong University and affiliation not provided to SSRN
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Abstract:

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grain size, magnetron sputtering, Substrate temperature, W content, Agglomeration