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Lina Xu

Wenzhou University

276 Xueyuan Middle Rd

Chashan University Town

Wenzhou, 325035

China

  • Wenzhou University

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Design and Self-Catalytic Mechanism of Aluminum Precursors Bearing Amino Ligands for Al2s3 Atomic Layer Deposition

Number of pages: 33 Posted: 21 Mar 2022
Zhongchao Zhou, Guoyong Fang, Yanghong Yu, Rui Xu, Xu Zhang, Yihong Ding, Xinhua Li, Yanqiang Cao, Aidong Li and Lina Xu
Wenzhou University, Wenzhou University, Wenzhou University, Wenzhou University, Wenzhou University, Wenzhou University, Wenzhou University, Nanjing University of Science and Technology, Nanjing University and Wenzhou University
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Abstract:

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Atomic layer deposition, Aluminum Sulfide, Metal Sulfide, Precursor Design, Self-catalysis