5 South Zhongguancun street
Center for Energy and Environmental Policy Researc
Beijing, 100081
China
Beijing Institute of Technology
MEMS speaker, Piezoelectric, Dual-electrode, Phase modulation
Micromirror, electrothermal actuator, lateral shift free, thermal modeling, large vertical displacement
Resilient quantitative guaranteed performance control (RQGPC), unknown system dynamics estimator (USDE), tracking control, saturation tolerance, microelectromechanical system (MEMS) gyroscopes
AlN thin film, patterning strategy, SiO₂ hard mask, piezoelectric response, MEMS device