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Huikai Xie

Beijing Institute of Technology

5 South Zhongguancun street

Center for Energy and Environmental Policy Researc

Beijing, 100081

China

SCHOLARLY PAPERS

4

DOWNLOADS

160

TOTAL CITATIONS

1

Scholarly Papers (4)

1.

Modulation of Dual-Electrode Ratio and Driving Phase of Piezoelectric Mems Speakers for Improving Sound Pressure Level

Number of pages: 14 Posted: 02 Aug 2024
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 54

Abstract:

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MEMS speaker, Piezoelectric, Dual-electrode, Phase modulation

2.

An Approach for Achieving Uniform Temperature Distribution on the Bimorphs of Electrothermal Micromirrors

Number of pages: 8 Posted: 22 Mar 2022
Beijing Institute of Technology, University of Science and Technology Beijing, Huaihai Industrial Group Co., Ltd, affiliation not provided to SSRN, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 48
Citation 1

Abstract:

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Micromirror, electrothermal actuator, lateral shift free, thermal modeling, large vertical displacement

3.

Anti-Disturbance Tracking Control for MEMS Gyroscopes With Resilient Guaranteed Profiles: Theory and Experiments

Number of pages: 9 Posted: 16 Sep 2025
Beijing Institute of Technology, North University of China, North University of China, Tiangong University, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 30

Abstract:

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Resilient quantitative guaranteed performance control (RQGPC), unknown system dynamics estimator (USDE), tracking control, saturation tolerance, microelectromechanical system (MEMS) gyroscopes

4.

A Patterning Strategy for Enhanced Piezoelectric Response of Aluminum Nitride (AlN) Thin Films

Number of pages: 10 Posted: 15 Jan 2026
Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology, Beijing Institute of Technology and Beijing Institute of Technology
Downloads 28

Abstract:

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AlN thin film, patterning strategy, SiO₂ hard mask, piezoelectric response, MEMS device