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Luxiao Xie
Hebei University of Technology
Tianjin
China
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Hebei University of Technology
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Preparation Method of Aln Single Crystal Thin Filmcapable of Optimizing Surface Flatness
Number of pages: 11
Posted: 20 Mar 2022
Luxiao Xie,
Hui Zhang
,
Xinjian Xie
,
Endong Wang
,
Xiangyu Lin
,
Yuxuan Song
,
Guodong Liu
and
Guifeng Chen
Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology, Hebei University of Technology - State Key Lab for Reliability and Intelligence of Electrical Equipment and Hebei University of Technology
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Abstract:
AlN substrate pretreatment, annealing, surface flatness
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