Joseph R. Michael

Sandia National Laboratories

P.O. Box 969

Livermore, CA 94551

United States

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Determining Stress in Metallic Conducting Layers of Microelectronics Devices Using High Resolution Electron Backscatter Diffraction and Finite Element Analysis

Number of pages: 9 Posted: 23 Mar 2022

Timothy Ruggles, Scott J. Grutzik and Joseph R. Michael

Sandia National Laboratories, Sandia National Laboratories and Sandia National Laboratories

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