Instrumentation, measurement, MEMS hydrophone, Ultra-low frequency acoustics, Vector sensor
Capacitive Micromachined Ultrasonic Transducer (CMUT), Mannitol Concentration, Ultrasonic Sensing, Speed of Sound
Microelectromechanical Systems (MEMS) vector hydrophone, Underwater acoustic detection, Biomimetic design, Finite element simulation, Ultra-low frequency sensing
MEMS, hydrophone, PMUT, vector detection, UUV
Temperature compensation, CMUT array, Salt concentration detection, Time-of-flight (TOF), Ultrasonic velocity
capacitive micromachined ultrasonic transducer (CMUT) array, time-of-flight (TOF), vegetable oil, sound speed, acoustic attenuation
Ultrasonic measurement, CMUT Array, Silicone Bubble Detection, Time of Flight (TOF), Ultrasonic Velocity