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Robert J. Devoe

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Thermal Feature-Size Enhancement in Multiphoton Photoresists

Number of pages: 27 Posted: 02 Apr 2022
Nikolaos Liaros, Zuleykhan Tomova, Sandra A. Gutierrez Razo, Robert J. Devoe, Brian J. Gates, David A. Ender and John Fourkas
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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multiphoton absorption polymerization, Photopolymerization, resolution enhancement, thermal effects, proportional velocity dependence