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Xiao Xiao

Southern University of Science and Technology

No 1088, xueyuan Rd.

Xili, Nanshan District

Shenzhen, 518055

China

  • Southern University of Science and Technology

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Scholarly Papers (1)

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Development of a Compliant Rolling-Contact Element Based Foldable Xy Stage for Micro-Positioning System

Number of pages: 16 Posted: 10 Apr 2022
Yanlin Xie, Yangmin Li, Chifai Cheung, Xiao Xiao, Xigang Chen and Ruobing Wang
affiliation not provided to SSRN, Hong Kong Polytechnic University, Hong Kong Polytechnic University, Southern University of Science and Technology, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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Foldable positioning stage, Compliant mechanism, Compliant rolling-contact element, Decoupling