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Ci Song

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Nonlinear Effects of Pulsed Ion Beam in Ultra-High Resolution Sputtering Material Removal

Number of pages: 7 Posted: 25 Apr 2022
Lingbo Xie, Ye Tian, Feng Shi, Ci Song, Guipeng Tie, Gang Zhou, Jianda Shao and Shijie Liu
National University of Defense Technology, National University of Defense Technology, National University of Defense Technology, affiliation not provided to SSRN, affiliation not provided to SSRN, National University of Defense Technology, affiliation not provided to SSRN and affiliation not provided to SSRN
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pulsed ion beam, ultra-high removal resolution, nonlinear effect of ion sputtering