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Zhi Deng

Tsinghua University

Beijing, 100084

China

  • Tsinghua University

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Surface Modification of Low-Background Polymers by Applying Nitrogen Ion Implantation for Electronic Substrates of Rare Event Detection

Number of pages: 18 Posted: 16 May 2022
Shasha Lv, Shaojun Zhang, Yuanyuan Liu, Jianping Cheng, Bing Liao, Pan Pang, Lin Chen, Zhi Deng, Yang Tian and Li He
Beijing Normal University (BNU) - Key Laboratory of Beam Technology and Material Modification, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tsinghua University, Tsinghua University and affiliation not provided to SSRN
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Ion implantation, direct metallization, Surface modification, Rare event detection