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Muhammad Izzuddin Samad

Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN)

SCHOLARLY PAPERS

3

DOWNLOADS

235

TOTAL CITATIONS

0

Scholarly Papers (3)

1.

Effects of Argon/Nitrogen Sputtering Gas on the Microstructural, Crystallographic and Piezoelectric Properties of AlN Thin Films

Number of pages: 14 Posted: 11 Oct 2022
Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN), Universiti Tun Hussein Onn Malaysia (UTHM) - Microelectronic and Nanotechnology-Shamsuddin Research Centre (MiNT-SRC), University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC), University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC), University Tenaga National - Institute of Sustainable Energy, Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN) and Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN)
Downloads 127 (572,948)

Abstract:

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piezoelectric force microscopy (PFM), Radio frequency (RF) sputtering, crystallography, Aluminium Nitride, argon plasma

2.

Enhancement of AlN Crystallisation for Thin Film Leakage Current Minimisation

Number of pages: 7 Posted: 10 Nov 2023
Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC), Universiti Tun Hussein Onn Malaysia (UTHM) - Microelectronic and Nanotechnology-Shamsuddin Research Centre (MiNT-SRC), University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC), University of Technology Malaysia and Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN)
Downloads 72 (867,774)

Abstract:

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crystal growth, crystal structure, Electrical properties, Microstructure, thin films

3.

Influence of Argon/Nitrogen Sputtering Gas and Molybdenum/Titanium Seed Layer on Aluminium Nitride 〈100〉 Thin Film Growth

Number of pages: 11 Posted: 06 Sep 2023
Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia - Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, affiliation not provided to SSRN, University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC), Universiti Tun Hussein Onn Malaysia (UTHM) - Microelectronic and Nanotechnology-Shamsuddin Research Centre (MiNT-SRC) and University of Malaya (UM) - Low Dimensional Materials Research Centre (LDMRC)
Downloads 36 (1,236,159)

Abstract:

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surface morphology, AlN target, crystal growth, molecular bonding, a-plane, c-plane