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Seho Sun

Hanyang University

Seoul

Korea, Republic of (South Korea)

SCHOLARLY PAPERS

1

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122

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Scholarly Papers (1)

1.

Modulation of Molybdenum Oxidation State Via Catalytic-Oxidation

Number of pages: 25 Posted: 26 Oct 2022
Hanyang University - Department of Energy Engineering, Samsung Electronics Co., Ltd., Hanyang University, Korea Institute of Ceramic Engineering and Technology (KICET), Ajou University, Hanyang University, Hanyang University and Hanyang University
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Abstract:

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Chemical Mechanical Planarization, Catalytic-oxidation, Molybdenum, Polymorphs, Dissolution kinetics, Middle-of-line (MOL)