Yixuan Zhang

Wuhan University of Technology

Wuhan

China

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Influence of Showerhead with Baffle on Physical Field of Hcvd Reactor

Number of pages: 17 Posted: 29 Oct 2022

Qizhong Li, Yixuan Zhang, Baifeng Ji, Song Zhang and Rong Tu

Wuhan University of Technology, Wuhan University of Technology, Wuhan University of Technology, Wuhan University of Technology and Wuhan University of Technology

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