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Mario Lessiak
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Influence of Process Conditions and Doping Agents on the Microstructure of Cvd-Altin
Number of pages: 7
Posted: 02 Nov 2022
Margarethe Traxler
, Mario Lessiak,
Ronald Weissenbacher
,
Reinhard Pitonak
,
Juraj Todt
,
Jakub Zalesak
and
Jozef Keckes
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Montanuniversität Leoben - Chair of Materials Physics, Austrian Academy of Sciences - Erich Schmid Institute of Materials Science and Montanuniversität Leoben - Chair of Materials Physics
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Abstract:
CVD, TiAlN, microstructure, doping, gradient
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