Kang Wang

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Room Temperature Bonding of Diamond/Si with Mo/Au Interlayers in Atmospheric Air

Number of pages: 10 Posted: 14 Nov 2022
Fei Wang, Kang Wang, Genqiang Chen, Fang Lin, RuoZheng Wang, Wei Wang, Zhang Minghui, Wenbo Hu and Hongxing Wang
affiliation not provided to SSRN, affiliation not provided to SSRN, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education and Xi'an Jiaotong University (XJTU) - Key Laboratory for Physical Electronics and Devices of the Ministry of Education
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Diamond on silicon, Mo/Au interlayer, Room temperature bonding, Bonding in atmospheric air