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Keonhyeok Park

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Wafer Map Failure Pattern Classification Using Geometric Transformation-Invariant Convolutional Neural Network

Number of pages: 33 Posted: 22 Nov 2022
Iljoo Jeong, Soo Young Lee, Keonhyeok Park, Iljeok Kim, Hyunsuk Huh and Seungchul Lee
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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Abstract:

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semiconductor manufacturing, wafer map pattern classification, convolutional neural network, rotation invariant representation, explainable AI