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Shanfeng Wang

affiliation not provided to SSRN

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Fabrication of Multilayer Fresnel Zone Plate for Hard X-Ray Microscopy by Atomic Layer Deposition and Focused Ion Beam Milling

Number of pages: 10 Posted: 22 Nov 2022
Yanli Li, Weier Lu, Shanfeng Wang, Qingxi Yuan, Xiangdong Kong, Li Han and Yang Xia
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Beijing Synchrotron Radiation Facility, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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multilayer, Fresnel zone plate, hard X-ray microscopy, atomic layer deposition, focused ion beam