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Francesco Gatti
Polytechnic of Milan
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Polytechnic of Milan
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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Role of Magnetic Field and Bias Configuration on Hipims Deposition of W Films
Number of pages: 34
Posted: 08 Dec 2022
Davide Vavassori
,
Francesco Mirani
, Francesco Gatti,
D. Dellasega
and
Matteo Passoni
Polytechnic of Milan, Polytechnic of Milan, Polytechnic of Milan, Polytechnic University of Milan and Polytechnic University of Milan
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Abstract:
Tungsten films, HiPIMS, Plasma modelling, magnetic field, bias voltage delay
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