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Carlos Patacas

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Adequate Tialn Thin Films Deposited by Sputtering for Thermistor Sensors: The Study of Conduction Mechanisms and the Microstructure Role on the Electrical Properties

Number of pages: 26 Posted: 07 Dec 2022
Bruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Oleksandr Bondarchuk and Filipe Fernandes
affiliation not provided to SSRN, affiliation not provided to SSRN, Universidade de Coimbra, affiliation not provided to SSRN, International Iberian Nanotechnology Laboratory and Universidade de Coimbra
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NTC thin-film thermistor, Reactive sputtering, Nitride semiconductors, impedance spectroscopy, Sheet resistance