Jiangong Cheng

Beijing University of Technology

100 Ping Le Yuan

Chaoyang District

Beijing, 100020

China

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Impact of Aminosilane and Silanol Precursor Structure on Atomic Layer Deposition Process

Number of pages: 18 Posted: 07 Dec 2022

Qiaohong Liu, Wenling Li, Jiangong Cheng, Zilong Zheng, Feng Geng and Hui Yan

Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, Beijing University of Technology, affiliation not provided to SSRN and Beijing University of Technology

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