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Patrick Sturm

affiliation not provided to SSRN

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Deposition and Characterisation of C-Axis Oriented Alscn Thin Films Via Microwave Plasma-Assisted Reactive Hipims

Number of pages: 27 Posted: 12 Dec 2022
Léo Lapeyre, Caroline Hain, Patrick Sturm, Janos Metzger, Aurelio Borzi, Krzysztof Wieczerzak, Patrice Raynaud, Johann Michler and Thomas Nelis
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Empa-Swiss Federal Laboratories for Materials Science and Technology - Center for X-ray Analytics, Swiss Federal Laboratories for Material Science and Technology (EMPA), affiliation not provided to SSRN, Laboratory for Mechanics of Materials and Nanostructures - Empa — Swiss Federal Laboratories for Materials Testing and Research and University of St. Gallen - Laboratory for Mechanics of Materials and Nanostructuresaffiliation not provided to SSRN
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Abstract:

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Aluminium Scandium Nitride, HiPIMS, microwave plasma, Plasma diagnostics, Thin films, Material characterisation