No Address Available
affiliation not provided to SSRN
laser ablation, laser-induced periodic surface structures, LIPSS, debris, wet-chemical etching, cleaning
super hydrophobicity, Laser Structuring, ultra-short pulse laser, Hydrogen Peroxide, chemical stability, SAM
Plasma Etching, pulsed UV laser irradiation, residual layer, reactive fluorine species, N-BK7, laser ablation