Raphael St-Gelais

University of Ottawa

2292 Edwin Crescent

Ottawa, K2C 1H7

Canada

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Laser Machining of Free-Standing Silicon Nitride Membranes

Number of pages: 20 Posted: 12 Dec 2022

Xitong Xie, Roghayeh Nikbakht, Martin Couillard, Raphael St-Gelais and Arnaud Weck

affiliation not provided to SSRN, affiliation not provided to SSRN, National Research Council Canada, University of Ottawa and University of Ottawa

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