default author photo

Ming Qin

Huazhong University of Science and Technology

1037 Luoyu Rd

Wuhan, 430074

China

  • Huazhong University of Science and Technology

SCHOLARLY PAPERS

2

DOWNLOADS

68

TOTAL CITATIONS

0

Scholarly Papers (2)

Actions:
Email selected abstracts
1.

Source and Mask Optimization Based on PID Optimizer

Number of pages: 24 Posted: 30 Dec 2022
Fei Peng, Ming Qin, Yiduo Xu, Yijiang Shen, Chengqun Gui and Yi Song
Wuhan University, Huazhong University of Science and Technology, Wuhan University, Guangdong University of Technology, Wuhan University and Wuhan University
Downloads 58 (989,921)

Abstract:

Loading...

Gradient methods, PI control, PD control, Computational Lithography

2.

Nanoscale Defocus and Sub-mrad Inclination Sensing via Multi-Focal Double-Helix PSF Engineering in Optical Microscopy

Number of pages: 18 Posted: 19 Feb 2026
Yueying Wang, Enqiao Xiao, Yinsen Liu, Ming Qin and Xiang Hao
Zhejiang University, affiliation not provided to SSRN, affiliation not provided to SSRN, Huazhong University of Science and Technology and Zhejiang University
Downloads 10 (1,555,090)

Abstract:

Loading...

Defocus detection, Specimen tilt detection, Double-helix point spread function, Optical focus array.