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A. L. Aguayo-Alvarado
Centro de Investigación Científica y Educación Superior de Ensenada (CICESE)
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Linear and Nonlinear Properties Study of Silicon Nitride Films for Integrated Photonics
Number of pages: 11
Posted: 15 Feb 2023
A. L. Aguayo-Alvarado,
F. A. Araiza-Sixtos
,
N. Abundiz-Cisneros
,
R. Rangel-Rojo
,
K. Garay-Palmett
and
W. De La Cruz
Centro de Investigación Científica y Educación Superior de Ensenada (CICESE), Centro de Investigación Científica y Educación Superior de Ensenada (CICESE), National Autonomous University of Mexico (UNAM), Centro de Investigación Científica y Educación Superior de Ensenada (CICESE), Centro de Investigación Científica y Educación Superior de Ensenada (CICESE) and National Autonomous University of Mexico (UNAM)
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Abstract:
Silicon nitride, RF sputtering, optical properties, integrated photonics
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