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Stephanie Birgit Burgmann

Norwegian University of Science and Technology (NTNU)

Høgskoleringen 7A

Trondheim, 7033

Norway

  • Norwegian University of Science and Technology (NTNU)

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Intrinsic Stress Analysis on Free Standing Ultrathin Membrane Structures Through Release of Microcantilevers

Number of pages: 22 Posted: 21 Feb 2023
Stephanie Birgit Burgmann, Markus Joakim Lid, Håkon J. D. Johnsen, Nils Petter Vedvik, Bjørn Haugen, J Provine, Antonius T. J. van Helvoort and Jan Torgensen
Norwegian University of Science and Technology (NTNU), Norwegian University of Science and Technology (NTNU), Norwegian University of Science and Technology (NTNU), Norwegian University of Science and Technology (NTNU), Norwegian University of Science and Technology (NTNU), Stanford University, Norwegian University of Science and Technology (NTNU) and Technische Universität München (TUM)
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Abstract:

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ultrathin membranes, FIB, intrinsic stress, strain analysis