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Stéphane Cadot
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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In the New Potential Synthesis Route of Molybdenum Nitride Nanosheets by Nitriding Mos2 Deposited by Atomic Layer Deposition (Ald)
Number of pages: 17
Posted: 22 Feb 2023
Julien Patouillard
,
Rémy Gassilloud
,
Frédéric Mercier
,
Arnaud Mantoux
,
Raphaël Boichot
,
Mathieu Bernard
,
Nicolas Gauthier
, Stéphane Cadot,
Christine Raynaud
,
Frédéric Gianesello
and
Elisabeth Blanquet
STMicroelectronics,
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,
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,
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,
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,
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,
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, STMicroelectronics and
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Abstract:
ALD, MXenes, in-situ, MoS2, nitridation
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