Yehua Tang

Henan University

85 Minglun St. Shunhe

Kaifeng, 475001

China

SCHOLARLY PAPERS

2

DOWNLOADS

41

TOTAL CITATIONS

0

Scholarly Papers (2)

Structure and Electrical Properties of Polysilicon Films Doped with Ammonium Tetraborate Tetrahydrate

Number of pages: 20 Posted: 12 May 2023
Henan University, North Minzu University, Henan University, affiliation not provided to SSRN and Henan University
Downloads 17 (1,251,785)

Abstract:

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Polysilicon film, boron doping, ammonium tetraborate tetrahydrate (ATT), electrical properties, crystallization

Structure and Electrical Properties of Polysilicon Films Doped with Ammonium Tetraborate Tetrahydrate

Number of pages: 21 Posted: 30 Jun 2023
Henan University, North Minzu University, Henan University, affiliation not provided to SSRN and Henan University
Downloads 12 (1,315,770)

Abstract:

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Polysilicon film, boron doping, ammonium tetraborate tetrahydrate (ATT), electrical properties, crystallization

2.

Effects of Ammonium Tetraborate Tetrahydrate on the Structure and Doping of Polysilicon Films

Number of pages: 23 Posted: 23 Feb 2023
Henan University, North Minzu University, Henan University, Henan University and affiliation not provided to SSRN
Downloads 12 (1,268,259)

Abstract:

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Ammonium tetraborate tetrahydrate (ATT), boron source, polysilicon, crystallization