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Maria Jurzecka-Szymacha
AGH University of Science and Technology
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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The Optical Properties of Thin Films Alloys of ZnO, TiO2 and ZrO2 with Al2O3 Synthesised by Atomic Layer Deposition
Number of pages: 15
Posted: 02 Mar 2023
Natalia Nosidlak
,
Janusz Jaglarz
,
Andrea Vallati
,
Piotr Dulian
, Maria Jurzecka-Szymacha,
Sylwia Gierałtowska
,
Aleksandra Seweryn
,
Łukasz Wachnicki
,
Bartłomiej S. Witkowski
and
Marek Godlewski
Cracow University of Technology, Cracow University of Technology, Sapienza University of Rome, Cracow University of Technology, AGH University of Science and Technology, Polish Academy of Sciences (PAS) - Institute of Physics, Polish Academy of Sciences (PAS) - Institute of Physics, Polish Academy of Sciences (PAS) - Institute of Physics, Polish Academy of Sciences (PAS) - Institute of Physics and Polish Academy of Sciences (PAS) - Institute of Physics
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Abstract:
ALD deposition, thin dielectric films, optical properties, ellipsometry
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